Correcting capacitive displacement measurements in metrology applications with cylindrical artifacts
نویسندگان
چکیده
Metrology applications commonly require non-contact, capacitive sensors for displacement measurements due to their nanometer resolution. In some metrology applications, for example, the measurement of roundness and spindle error motion, the displacements of stationary and rotating cylindrical artifacts are measured. Error from using a conventionally calibrated sensor with a non-flat (e.g., cylindrical) target is t t s b p o ©
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